The Thin-film deposition reference article from the English Wikipedia on 24-Apr-2004 (provided by Fixed Reference: snapshots of Wikipedia from wikipedia.org)

Thin-film deposition

Thin-film deposition is any technique for depositing (controlled deposition) of thin films of material unto a substrate (or unto previously deposited layers), especially in the manufacture of semiconductors and other electronic components.

Related terms: sputtering, vacuum deposition, vapor deposition, MEMs (microelectromechanical devices), nanotechnology

(see Materials science)

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External Links

(A Google search on "thin film deposition" leads to 25,000 links, mostly for related equipment, textbooks, and university courses; very little of a tutorial or explanatory nature)

• University of Wisconsin: Laboratory for Thin Film Deposition
• Cambridge University Facilities
• Thin Film Deposition Processes and Techniques (A textbook summary and order form)
• ORNL (Oak Ridge National Laboratory)
• [1]

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